Any one conversant with photolithographic work will understand this.
"Scientific American Supplement, No. 362, December 9, 1882" by Various
The first photolithographic reproduction was brought out in 1866.
"Comfort Found in Good Old Books" by George Hamlin Fitch
This technological process requires several photolithographic steps to etch different layers.
An integrated optics beam combiner for the second generation VLTI instruments
The GEM foils for both large-area prototypes were produced at CERN using a photolithographic process with a 50 µm thick kapton sheet with a 5 µm copper cladding on both sides.
Construction and Performance of Large-Area Triple-GEM Prototypes for Future Upgrades of the CMS Forward Muon System
The NTD Ge thermistors can be replaced with photolithographed transition edge superconductor [29, 30].
Experimental CMB Status and Prospects: A Report from Snowmass 2001
The current trend is towards photolithographic arrays of bolometers, although techniques are being devised that could make radiometer arrays perfectly feasible and competitive.
The CMB polarization: status and prospects
This compact ﬁlter design does not include any “vias” (direct electrical contacts to the ground plane), and is fully compatible with photolithographic processes.
Antenna-coupled TES bolometer arrays for CMB polarimetry
The silicon membrane: a) Photolithograph membrane design and results of a numeric simulation using the software Cosmos (the membrane oscillation is of its fundamental mode).
The Past, Present and Future of the Resonant-Mass Gravitational Wave Detectors
This is due to their exquisite sensitivity for incoherent detection, ease for fabrication of large monolithic arrays using photolithographic techniques, and relative insensitivity to microphonics due to their low impedance.
Biasing and Demodulation Firmware for Kilopixel TES Bolometer Arrays
It should be noted that the same numerical models are also used to predict, e.g. the imaging properties of mask structures in a photolithographic process. A better understanding of the accuracy of the optical models is therefore crucial also for many other applications than scatterometry.
Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry